1.application:
the equipment is batch type induction furnace, mainly used for cvd in carbon carbon material and carbon composite material or graphite parts material.
2.configuration:
380v±5%，50hz/60hz 3 phase 5 wire
one control cabinet to one furnace, the facility equipped of mixed gas control system, cooling tower for optional.
|
model parameter |
lab usage |
production usage |
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|
nti-cjl-42l |
nti-cjl-100l |
nti-cjl-196l |
nti-cjl-339l |
nti-cjl-803l |
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|
working size |
mm |
300×600 |
400x800 |
500×1000 |
600x1200 |
800x1600 |
|
heating type |
/ |
if induction heating |
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|
crucible |
/ |
graphite |
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|
control type |
/ |
thyristor control or igbt control ( optional ) |
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|
ht zone capacity |
l |
42 |
100 |
196 |
339 |
803 |
|
loading weight |
g |
ht zone capacity × density (g/cm³)×1000 remark：1l=1000cm³ |
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|
ultimate vacuum |
pa |
50 |
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|
if power |
kw |
100 |
150 |
200 |
250 |
350 |
|
max. working temperature |
℃ |
2500 |
2500 |
2500 |
2500 |
2500 |
|
vapor deposition temperature |
℃ |
within 2000℃ |
within 2000℃ |
within 2000℃ |
within 2000℃ |
within 2000℃ |
|
temperature uniformity |
℃ |
±5 |
±5 |
±10 |
±10 |
±10 |
|
overall dimension |
mm |
5000x6000 |
5500x6500 |
6000x7000 |
6500x7500 |
7000x8000 |
|
weight |
kg |
|
|
|
|
|
|
working environment |
/ |
vacuum, argon, nitrogen, hydrogen atmosphere protection |
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|
vapor deposition environment |
/ |
300-3000pa air pressure, charging into ch₃ch₂ch₃, ch4, c3h6. |
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